Title:
Nanofabrication by ion-beam sputtering fundamentals and applications
Author:
Som, Tapobrata.
ISBN:
9789814303767
Publication Information:
Singapore : Pan Stanford Pub., 2013.
Physical Description:
xix, 335 p., [16] p. of plates : ill. (some col.).
Contents:
1. Elements of sputtering theory / Peter Sigmund -- 2. Sputter-ripple formation on flat and rough surfaces : a case study with Si 41 / Safiul Alam Mollick and Debabrata Ghose -- 3. Low-energy ion-induced pattern formation in Si-Ge alloy / Subhendu Sarkar -- 4. Patterning of ionic insulator surfaces with low-energy ion beams / Franciszek Krok ... [et al.] -- 5. Nanostructures on thin films by keV ion beams / Prasanta Karmakar -- 6. Surface nanopatterns on Si(100) by normal-incidence ion sputtering with metal incorporation / Ral͠ Gago ... [et al.] -- 7. Kinetic Monte Carlo simulations of low-energy ion-induced surface patterning / Wai-Lun Chan and Eric Chason -- 8. From cascades to patterns : a Monte Carlo approach / Reiner Kree and Taha Yasseri -- 9. Understanding surface patterning by lattice gas models / Gža ¿dor, Bartosz Liedke, and Karl-Heinz Heinig -- 10. Applications of ion beam patterned substrates in plasmonics / Mukesh Ranjan, Thomas W.H. Oates, and Stefan Facsko.
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