Silicon Wafer Bonding Technology for VLSI and MEMS Applications

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Title:

Author:

Iyer, S. S., ed.

ISBN:

9781849193702

Publication Information:

Stevenage : IET, 2002.

Physical Description:

1 online resource (175 p.)

Series:

Circuits, Devices and Systems

Series Title:

Circuits, Devices and Systems

Subject Term:

Added Author:

Electronic Access:

Holds:
Copies:

Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	247777-1001	ONLINE	Searching... Unknown	Searching... Unavailable