Cover image for Tribology in chemical-mechanical planarization
Title:
Tribology in chemical-mechanical planarization
Author:
Liang, Hong, 1961-
ISBN:
9781420028393
Publication Information:
Boca Raton, Fla. : Taylor & Francis, 2005.
Physical Description:
185 p. : ill.
Subject Term:
Tribology.

Grinding and polishing.

Chemical mechanical planarization.
Added Author:
Craven, David R., 1945-
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