Cover image for Data-Driven Scheduling of Semiconductor Manufacturing Systems
Title:
Data-Driven Scheduling of Semiconductor Manufacturing Systems
Author:
Li, Li. author.
ISBN:
9789811975882
Edition:
1st ed. 2023.
Physical Description:
XI, 266 p. 84 illus., 41 illus. in color. online resource.
Series:
Advanced and Intelligent Manufacturing in China,
Contents:
Semiconductor Manufacturing System Scheduling -- Data-driven Scheduling Framework of Semiconductor Manufacturing System -- Data Preprocessing of Semiconductor Manufacturing System -- Correlation Analysis of Performance Index of Semiconductor Production Line -- Data-driven Feeding Control of Semiconductor Manufacturing System -- Dynamic Scheduling of Semiconductor Manufacturing System Driven by Data -- Dynamic Scheduling of Performance-Driven Semiconductor Manufacturing System -- Development Trend of Semiconductor Manufacturing System Scheduling in Big Data Environment.
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