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Cover image for Handbook of VLSI microlithography principles, technology, and applications
Handbook of VLSI microlithography principles, technology, and applications
Author 
Helbert, John N.
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ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815514442
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2. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
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ONLINE
Electronic Access 
Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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