Cover image for X-ray metrology in semiconductor manufacturing
Title:
X-ray metrology in semiconductor manufacturing
Author:
Bowen, D. Keith (David Keith), 1940-
ISBN:
9781420005653
Publication Information:
Boca Raton : CRC/Taylor & Francis, 2006.
Physical Description:
279 p. : ill.
Subject Term:
Semiconductors -- Design and construction -- Quality control.

Integrated circuits -- Measurement.

Semiconductor wafers -- Inspection.

X-rays -- Diffraction.

Fluroscopy.
Added Author:
Tanner, B. K. (Brian Keith)
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