Nano-CMOS gate dielectric engineering

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Title:

Author:

Wong, Hei.

ISBN:

9781439849606

Publication Information:

Boca Raton : CRC Press, 2012.

Physical Description:

xiv, 234 p. : ill.

Contents:

1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.

Subject Term:

Metal oxide semiconductors, Complementary -- Design and construction.

Dielectrics.

Gate array circuits.

Nanoelectronics -- Materials.

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