Cover image for MEMS : applications
Title:
MEMS : applications
Author:
Gad-el-Hak, Mohamed, 1945-
ISBN:
9780429125478
Edition:
Second edition.
Physical Description:
1 online resource (568 pages)
Series:
Mechanical engineering series

The MEMS handbook

Mechanical engineering series (Boca Raton, Fla.)
General Note:
One of three parts whose previous edition was a published as a single volume.
Contents:
chapter 1 Introduction -- chapter 2 Inertial Sensors -- chapter 3 Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits -- chapter 4 Surface Micromachined Devices -- chapter 5 Microactuators -- chapter 6 Sensors and Actuators for Turbulent Flows -- chapter 7 Microrobotics -- chapter 8 Microscale Vacuum Pumps -- chapter 9 Nonlinear Electrokinetic Devices -- chapter 10 Microdroplet Generators -- chapter 11 Micro Heat Pipes and Micro Heat Spreaders -- chapter 12 Microchannel Heat Sinks -- chapter 13 Flow Control -- chapter 14 Reactive Control for Skin-Friction Reduction -- chapter 15 Toward MEMS Autonomous Control of Free-Shear Flows.
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E-Book 540919-1001 TK7875 .M423 2005
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