Handbook of silicon based MEMS materials & technologies

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Title:

Author:

Lindroos, Veikko.

ISBN:

9780815515944

9781282541146

Publication Information:

Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010.

Physical Description:

1 online resource.

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Electronic Access:

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	145533-2001	ONLINE	Searching... Unknown	Searching... Unavailable