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1. 
Cover image for Fundamentals of Nanomechanical Resonators
Fundamentals of Nanomechanical Resonators
Author 
Schmid, Silvan. author. Villanueva, Luis Guillermo. author. Roukes, Michael Lee. author. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
https://doi.org/10.1007/978-3-031-29628-4
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2. 
Cover image for 3D and circuit integration of MEMS
3D and circuit integration of MEMS
Author 
Esashi, Masayoshi, 1949- author.
Preferred Shelf Number 
TK7875 .E73 2021 EB
Electronic Access 
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527823239
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3. 
Cover image for MEMS : fundamental technology and applications
MEMS : fundamental technology and applications
Author 
Choudhary, Vikas. Iniewski, Krzysztof.
Preferred Shelf Number 
TK7875 .M457 2013
Electronic Access 
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