Title:
MEMS : design and fabrication
Author:
Gad-el-Hak, Mohamed, 1945-
ISBN:
9780429125461
Edition:
Second edition.
Physical Description:
1 online resource (664 pages)
Series:
Mechanical engineering series
The MEMS handbook
Mechanical engineering series (Boca Raton, Fla.)
General Note:
One of three parts whose previous edition was a published as a single volume.
Contents:
chapter 1 Introduction -- chapter 2 Materials for Microelectro-mechanical Systems -- chapter 3 MEMS Fabrication -- chapter 4 LIGA and Micromolding -- chapter 5 X-Ray–Based Fabrication -- chapter 6 EFAB™ Technology and Applications -- chapter 7 Single-Crystal Silicon Carbide MEMS -- chapter 8 Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide -- chapter 9 Polymer Microsystems -- chapter 10 Optical Diagnostics to Investigate the Entrance Length in Microchannels -- chapter 11 Microfabricated Chemical Sensors for Aerospace Applications -- chapter 12 Packaging of Harsh Environment MEMS Devices -- chapter 13 Fabrication Technologies for Nanoelectro-mechanical Systems -- chapter 14 Molecular Self-Assembly.
Added Author:
Electronic Access:
Click here to view.Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 539884-1001 | TK7875 .M444 2006 | Searching... | Searching... |