Cover image for Microoptics and nanooptics fabrication
Title:
Microoptics and nanooptics fabrication
Author:
Kemme, Shanalyn A.
ISBN:
9781420019148
Physical Description:
1 online resource (xii, 218 pages)
Contents:
chapter 1 Chapter Fabricating Surface-Relief Diffractive Optical Elements -- chapter 2 Chapter Fabrication of Microoptics with Plasma Etching Techniques -- chapter 3 Chapter Analog Lithography with Phase-Grating Masks -- chapter 4 Chapter Electron Beam Lithography for the Nanofabrication of Optical Devices -- chapter 5 Chapter Nanoimprint Lithography and Device Applications -- chapter 6 Chapter Design and Fabrication of Planar Photonic Crystals -- chapter 7 Chapter Fabrication of 3D Photonic Crystals: Molded Tungsten Approach.
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E-Book 539501-1001 TA418.9 .N35 M533 2010
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