Electron-beam technology in microelectronic fabrication

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Title:

Author:

Brewer, George Raymond, 1922-

ISBN:

9780121335502

9780323153416

Publication Information:

New York : Academic Press, 1980.

Physical Description:

1 online resource (xi, 362 pages) : illustrations

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	254924-1001	ONLINE	Searching... Unknown	Searching... Unavailable