Cover image for Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems
Title:
Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems
Author:
Feldman, Martin, editor.
ISBN:
9780857098757
Physical Description:
1 online resource (p. cm.)
Series:
Woodhead Publishing series in electronic and optical materials

Woodhead Publishing series in electronic and optical materials.
General Note:
Previously issued in print: 2013.
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E-Book 355924-1001 ONLINE(355924.1)
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