Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

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Title:

Author:

Gao, Wei. author.

ISBN:

9781849962544

Physical Description:

XIV, 355p. 337 illus. online resource.

Series:

Springer Series in Advanced Manufacturing, 0

Series Title:

Springer Series in Advanced Manufacturing, 1860-5168 ; 0

Subject Term:

Added Corporate Author:

Electronic Access:

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	176200-2001	ONLINE	Searching... Unknown	Searching... Unavailable