Cover image for Process Technology for Silicon Carbide Devices
Title:
Process Technology for Silicon Carbide Devices
Author:
Zetterling, Carl-Mikael, ed.
ISBN:
9781849193719
Publication Information:
Stevenage : IET, 2002.
Physical Description:
1 online resource (200 p.)
Series:
Circuits, Devices and Systems
Series Title:
Circuits, Devices and Systems
Subject Term:
Dielectrics.

Diffusion.

Diodes, Schottky-barrier.

Electronic apparatus and appliances.

Epitaxy.

Etching.

Ion implantation.

Micromechanics.

Ohmic contacts.

Power semiconductors.

Semiconductors.

Semiconductors--Junctions.

Silicon compounds.

Wide gap semiconductors.
Added Author:
Zetterling, Carl-Mikael,
Electronic Access:
http://dx.doi.org/10.1049/PBEP002E
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