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1. 
Cover image for Plasma electronics : applications in microelectronic device fabrication
Plasma electronics : applications in microelectronic device fabrication
Author 
Makabe, T. (Toshiaki), author. Petrovic, Z., author.
Preferred Shelf Number 
TA2020 .M35 2015
Electronic Access 
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2. 
Cover image for Plasma nanoscience basic concepts and applications of deterministic nanofabrication
Plasma nanoscience basic concepts and applications of deterministic nanofabrication
Author 
Ostrikov, K. (Kostya)
Preferred Shelf Number 
ONLINE
Electronic Access 
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=482216
MyiLibrary, Table of contents http://www.myilibrary.com?id=194721&ref=toc
http://onlinelibrary.wiley.com/book/10.1002/9783527623327
John Wiley http://dx.doi.org/10.1002/9783527623327
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3. 
Cover image for Plasma-aided nanofabrication from plasma sources to nanoassembly
Plasma-aided nanofabrication from plasma sources to nanoassembly
Author 
Ostrikov, K. (Kostya) Xu, Shuyan. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527611553
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=481879
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4. 
Cover image for Plasma electronics : applications in microelectronic device fabrication
Plasma electronics : applications in microelectronic device fabrication
Author 
Makabe, T. (Toshiaki), author. Petrovic, Z.
Preferred Shelf Number 
TA2020 .M35 2006
Electronic Access 
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5. 
Cover image for Cold plasma in materials fabrication from fundamentals to applications
Cold plasma in materials fabrication from fundamentals to applications
Author 
Grill, Alfred.
Preferred Shelf Number 
ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
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