Cover image for Computational lithography
Title:
Computational lithography
Author:
Ma, Xu, 1983-
ISBN:
9780470618943

9780470618936

9780470596975

9781118043578
Publication Information:
Hoboken, N.J. : Wiley, c2010.
Physical Description:
1 online resource (xv, 226 p.) : ill.
Series:
Wiley series in pure and applied optics
Series Title:
Wiley series in pure and applied optics
Subject Term:
Microlithography -- Mathematics.

Integrated circuits -- Design and construction -- Mathematics.

Photolithography -- Mathematics.

Semiconductors -- Etching -- Mathematics.

Resolution (Optics)
Genre:
Electronic books.
Added Author:
Arce, Gonzalo R.
Added Corporate Author:
Wiley InterScience (Online service)
Electronic Access:
Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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