Cover image for Ion beam assisted film growth
Title:
Ion beam assisted film growth
Author:
Itoh, Tadatsugu.
ISBN:
9780444872807
Publication Information:
Amsterdam ; New York : Elsevier, 1989.
Physical Description:
1 online resource (xvii, 439 p.) : ill.
Series:
Beam modification of materials ; 3
Series Title:
Beam modification of materials ; 3
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