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Cover image for Principles of physical vapor deposition of thin films
Principles of physical vapor deposition of thin films
Author 
SreeHarsha, K. S.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780080446998
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2. 
Cover image for PVD for microelectronics sputter deposition applied to semiconductor manufacturing
PVD for microelectronics sputter deposition applied to semiconductor manufacturing
Author 
Powell, Ronald A. Rossnagel, Stephen M.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780125330268
Format: 
Availability 
Online Library~1
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