PVD for microelectronics sputter deposition applied to semiconductor manufacturing

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Title:

Author:

Powell, Ronald A.

ISBN:

9780125330268

Publication Information:

San Diego : Academic Press, c1999.

Physical Description:

1 online resource (xiii, 419 p.) : ill.

Series:

Thin films ; v. 26

Series Title:

Thin films ; v. 26

Subject Term:

Added Author:

Electronic Access:

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	256315-1001	ONLINE	Searching... Unknown	Searching... Unavailable