Cover image for Computational lithography
Title:
Computational lithography
Author:
Ma, Xu, 1983-
ISBN:
9780470618943

9780470618936

9780470596975

9781118043578
Publication Information:
Hoboken, N.J. : Wiley, c2010.
Physical Description:
1 online resource (xv, 226 p.) : ill.
Series:
Wiley series in pure and applied optics
Series Title:
Wiley series in pure and applied optics
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