Cover image for Micromechanics and MEMS classic and seminal papers to 1990
Title:
Micromechanics and MEMS classic and seminal papers to 1990
Author:
Trimmer, W.
ISBN:
9780470545263
Publication Information:
New York : IEEE Press, 1997.
Physical Description:
1 online resource (xv, 701 p.) : ill.
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