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Cover image for Ionized physical vapor deposition
Title:
Ionized physical vapor deposition
Author:
Hopwood, Jeffrey A.
ISBN:
9780125330275
Publication Information:
San Diego : Academic Press, c2000.
Physical Description:
1 online resource (xii, 253 p.) : ill.
Series:
Thin films ; v. 27
Series Title:
Thin films ; v. 27
Subject Term:
Thin film devices -- Design and construction.

Physical vapor deposition.

Thin films.
Genre:
Electronic books.
Added Author:
Hopwood, Jeffrey A.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780125330275
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