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Cover image for Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications
Title:
Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications
Author:
Seshan, Krishna.
ISBN:
9781591241935

9780815517788

9780815514428

9780815517764
Edition:
2nd ed.
Publication Information:
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.
Physical Description:
1 online resource (xxviii, 629 p.) : ill.
Series:
Materials science and process technology series. Electronic materials and process technology
Series Title:
Materials science and process technology series. Electronic materials and process technology
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