Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

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Title:

Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

Author:

Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)

ISBN:

9780444596918

Conference Author:

Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)

Publication Information:

Amsterdam : North-Holland, 1993.

Physical Description:

1 online resource (xiv, 338 p.) : ill.

Series:

European Materials Research Society symposia proceedings ; v. 34

Series Title:

European Materials Research Society symposia proceedings ; v. 34

Subject Term:

Semiconductors -- Analysis -- Congresses.

Semiconductors -- Quality control -- Congresses.

Semiconductors -- Optical properties -- Congresses.

Prozessüberwachung.

Genre:

Strassburg (1992)

Added Author:

Woollam, John A.

Added Corporate Author:

European Materials Research Society.

Electronic Access:

ScienceDirect http://www.sciencedirect.com/science/book/9780444899088

Holds:
Copies:

Available:*

Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	256273-1001	ONLINE	Searching... Unknown	Searching... Unavailable

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