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Cover image for Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
Title:
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
Author:
Lyshevski, Sergey Edward.
ISBN:
9780849328381
Publication Information:
Boca Raton : CRC Press, 2005.
Physical Description:
338 s. : res.
Series:
Nano- and microscience, engineering, technology, and medicine series.
Series Title:
Nano- and microscience, engineering, technology, and medicine series.
Holds:
Copies:

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Book 7.2/12/502190 TK7875 .L96 2005
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