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Cover image for Fabrication and design of resonant microdevices
Title:
Fabrication and design of resonant microdevices
Author:
Bahreyni, Behraad.
ISBN:
9780815515777

9780815517115
Publication Information:
Norwich, NY : W. Andrew Inc., c2008.
Physical Description:
1 online resource (xiii, 181 p.) : ill.
Series:
Micro & nano technologies ; 3
Series Title:
Micro & nano technologies ; 3
Holds:
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