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1. 
Cover image for Microfabrication and nanomanufacturing
Microfabrication and nanomanufacturing
Author 
Jackson, Mark J.
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ONLINE
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2. 
Cover image for 3D laser microfabrication principles and applications
3D laser microfabrication principles and applications
Author 
Misawa, Hiroaki. Juodkazis, Saulius.
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HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/59356960.html
John Wiley http://dx.doi.org/10.1002/352760846X
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3. 
Cover image for MEMS design and fabrication
MEMS design and fabrication
Author 
Gad-el-Hak, Mohamed, 1945-
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