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Cover image for Microfabrication and nanomanufacturing
Title:
Microfabrication and nanomanufacturing
Author:
Jackson, Mark J.
ISBN:
9781420028270
Publication Information:
Boca Raton, FL : CRC/Taylor & Francis, 2006.
Physical Description:
401 p. : ill.
Subject Term:
Microelectronics.

Integrated circuits -- Design and construction.

Microelectromechanical systems -- Design and construction.
Added Author:
Jackson, Mark J.
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