Plasma etching an introduction

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Title:

Plasma etching an introduction

Author:

Manos, Dennis M.

ISBN:

9780080924465

Publication Information:

Boston : Academic Press, c1989.

Physical Description:

1 online resource (xii, 476 p.) : ill.

Series:

Plasma -- materials interactions

Series Title:

Plasma -- materials interactions

Subject Term:

Plasma etching.

Added Author:

Manos, Dennis M.

Flamm, Daniel L.

Electronic Access:

ScienceDirect http://www.sciencedirect.com/science/book/9780124693708

Holds:
Copies:

Available:*

Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	255208-1001	ONLINE	Searching... Unknown	Searching... Unavailable

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