Search Results for Plasma etching.

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Plasma etching an introduction

Author

Manos, Dennis M. Flamm, Daniel L.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780124693708

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Plasma etching processes for CMOS device realization

Author

Posseme, Nicolas, editor.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9781785480966

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Plasma deposition, treatment, and etching of polymers

Author

D'Agostino, Riccardo.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780122004308

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Plasma surface modification of polymers : relevance to adhesion

Author

Lyons, editor. Mittal, Kash L., 1945- editor. Taylor and Francis.

Preferred Shelf Number

QD381.9 .S97 P537 2014

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Plasma processing of nanomaterials

Author

Sankaran, Mohan.

Preferred Shelf Number

TA418.9 .N35 P53 2012

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Complex and dusty plasmas : from laboratory to space

Author

Fortov, V. E. Morfill, G. E.

Preferred Shelf Number

QC718.5 .D84 C66 2010

Electronic Access

Taylor & Francis http://www.taylorfrancis.com/books/9781420083125
Taylor & Francis https://www.taylorfrancis.com/books/9781420083125
Taylor & Francis https://www.taylorfrancis.com/books/9780367802882
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf

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Microoptics and nanooptics fabrication

Author

Kemme, Shanalyn A.

Preferred Shelf Number

TA418.9 .N35 M533 2010

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Cover image for Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving

Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving

Author

Wüthrich, Rolf.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780815515876

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Principles of plasma discharges and materials processing

Author

Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.

Preferred Shelf Number

ONLINE

Electronic Access

Full text available from Wiley InterScience
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
John Wiley http://dx.doi.org/10.1002/0471724254
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html

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10.

Industrial plasma engineering. Volume 2, Applications to nonthermal plasma processing

Author

Roth, J. Reece., author.

Preferred Shelf Number

TA2020 .R68 2001

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11.

Etching in microsystem technology

Author

Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/9783527613786

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12.

Ätzverfahren für die Mikrotechnik

Author

Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/3527602917

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