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1. 
Cover image for Plasma etching an introduction
Plasma etching an introduction
Author 
Manos, Dennis M. Flamm, Daniel L.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780124693708
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2. 
Cover image for Plasma etching processes for CMOS device realization
Plasma etching processes for CMOS device realization
Author 
Posseme, Nicolas, editor.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9781785480966
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3. 
Cover image for Plasma deposition, treatment, and etching of polymers
Plasma deposition, treatment, and etching of polymers
Author 
D'Agostino, Riccardo.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780122004308
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4. 
Cover image for Plasma surface modification of polymers : relevance to adhesion
Plasma surface modification of polymers : relevance to adhesion
Author 
Lyons, editor. Mittal, Kash L., 1945- editor. Taylor and Francis.
Preferred Shelf Number 
QD381.9 .S97 P537 2014
Electronic Access 
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5. 
Cover image for Plasma processing of nanomaterials
Plasma processing of nanomaterials
Author 
Sankaran, Mohan.
Preferred Shelf Number 
TA418.9 .N35 P53 2012
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6. 
Cover image for Microoptics and nanooptics fabrication
Microoptics and nanooptics fabrication
Author 
Kemme, Shanalyn A.
Preferred Shelf Number 
TA418.9 .N35 M533 2010
Electronic Access 
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7. 
Cover image for Complex and dusty plasmas : from laboratory to space
Complex and dusty plasmas : from laboratory to space
Author 
Fortov, V. E. Morfill, G. E.
Preferred Shelf Number 
QC718.5 .D84 C66 2010
Electronic Access 
Taylor & Francis http://www.taylorfrancis.com/books/9781420083125
Taylor & Francis https://www.taylorfrancis.com/books/9781420083125
Taylor & Francis https://www.taylorfrancis.com/books/9780367802882
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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8. 
Cover image for Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Author 
Wüthrich, Rolf.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515876
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9. 
Cover image for Principles of plasma discharges and materials processing
Principles of plasma discharges and materials processing
Author 
Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.
Preferred Shelf Number 
ONLINE
Electronic Access 
Full text available from Wiley InterScience
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
John Wiley http://dx.doi.org/10.1002/0471724254
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
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10. 
Cover image for Industrial plasma engineering. Volume 2, Applications to nonthermal plasma processing
Industrial plasma engineering. Volume 2, Applications to nonthermal plasma processing
Author 
Roth, J. Reece., author.
Preferred Shelf Number 
TA2020 .R68 2001
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11. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527613786
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12. 
Cover image for Ätzverfahren für die Mikrotechnik
Ätzverfahren für die Mikrotechnik
Author 
Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/3527602917
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