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Subject: Microelectromechanical systems.

Author

SpringerLink (Online service)

(61)

Wiley InterScience (Online service)

(4)

Fintschenko, Yolanda.

(2)

Gad-el-Hak, Mohamed, 1945-

(2)

Ichalkaranje, Nikhil. editor.

(2)

Iniewski, Krzysztof.

(2)

Jain, Lakhmi C. editor.

(2)

Nguyen, Nam-Trung, 1970-

(2)

Patnaik, Srikanta. editor.

(2)

Rebeiz, Gabriel M.

(2)

Varadan, V. K., 1943-

(2)

Vinoy, K. J. (Kalarickaparambil Joseph), 1969-

(2)

Wang, Zhiming M. editor.

(2)

Ab. Hamid, Khairuddin. editor.

(1)

Ab. Nasir, Ahmad Fakhri. editor.

(1)

Abdullah, Muhammad Amirul. editor.

(1)

Ahmad, Mohd Rozi. editor.

(1)

Alioto, Massimo. author.

(1)

Amaldi, Andrea. editor.

(1)

Anandharamakrishnan, C. author.

(1)

Ananthasuresh, Gondi Kondaiah. editor.

(1)

Aoki, Hideo. editor.

(1)

Balestra, Francis. editor.

(1)

Baltes, H. (Henry)

(1)

(1)

Banks, Danny., author.

(1)

(1)

Basiuk, Elena V. editor.

(1)

Basiuk, Vladimir A. editor.

(1)

Baskin, Lev. author.

(1)

Benfenati, Fabio. editor.

(1)

Bentley, Barry. editor.

(1)

Bergmann, Carlos P. author.

(1)

Berthier, Jean, 1952-

(1)

Bhushan, Bharat. author.

(1)

Biswas, Arindam. editor.

(1)

Borchert, Holger. author.

(1)

Bostamam, Anas Muhamad. editor.

(1)

Bower, Kenneth E.

(1)

Brand, Oliver, 1964-

(1)

Castillo-León, Jaime. editor.

(1)

Chakrabarty, Krishnendu.

(1)

Champion, John.

(1)

Chen, Fred. author.

(1)

Cheng, Chuan. author.

(1)

Chiao, Jung-Chih.

(1)

(1)

Choudhary, Vikas.

(1)

Consoli, Elio. author.

(1)

Corves, Burkhard. author.

(1)

Corves, Burkhard. editor.

(1)

Credi, Alberto. editor.

(1)

Danafar, Firoozeh. author.

(1)

Darrin, M. Ann Garrison.

(1)

Demarchi, Danilo. editor.

(1)

Di Fabrizio, Enzo. editor.

(1)

Duan, Xuanming. author.

(1)

Dubey, Poornima. author.

(1)

Dubrovskii, Vladimir G. author.

(1)

Ducharme, Stephen. author.

(1)

Dugger, Michael T.

(1)

Dutta, Gorachand. editor. (orcid)0000-0003-2980-9826

(1)

Evtugyn, Gennady. author.

(1)

Fair, Richard B.

(1)

Fedder, G. K. (Gary K.)

(1)

Fischer-Hirchert, Ulrich H. P. author.

(1)

Flandre, Denis. editor.

(1)

Fomin, Vladimir M. editor.

(1)

Franssila, Sami.

(1)

Fridkin, Vladimir. author.

(1)

Fu, Lan. editor.

(1)

Galup-Montoro, Carlos. author.

(1)

Gaol, Ford Lumban. editor.

(1)

Gatzen, Hans H. author.

(1)

Gemming, Thomas. author.

(1)

Ghosh, Amitabha. author.

(1)

(1)

Goll, Bernhard. author.

(1)

Gopalakrishnan, S.

(1)

Gopinath, P. author.

(1)

Gu, Ning. editor.

(1)

Guha, Koushik. editor.

(1)

Güçlü, Alev Devrim. author.

(1)

Hashemipour Rafsanjani, Hassan. author.

(1)

Hawrylak, Pawel. author.

(1)

Hay, Jennifer. editor.

(1)

Heimer, Thomas.

(1)

Hosaka, Hiroshi, 1956-

(1)

Institute of Electrical and Electronics Engineers.

(1)

Jakšić, Zoran. author.

(1)

Jha, A. R., author.

(1)

Jonsson, Per. editor.

(1)

(1)

Joshi, Yogesh M. editor.

(1)

Kaajakari, Ville.

(1)

Kaltenbacher, Manfred. author.

(1)

Kam, Hei. author.

(1)

Kaushik, Brajesh Kumar. author.

(1)

(1)

Khairuddin, Ismail Mohd. editor.

(1)

Khandekar, Sameer. editor.

(1)

Kilchytska, Valeriya. editor.

(1)

(1)

Knopf, George K.

(1)

Korkusinski, Marek. author.

(1)

Korvink, J. G. (Jan G.)

(1)

Kubby, Joel A..

(1)

Kuncser, Victor. editor.

(1)

Kutter, Jorg P.

(1)

Kutter, Jörg P.

(1)

Lau, John H. author.

(1)

Laupheimer, Michaela. author.

(1)

(1)

Lenka, Trupti Ranjan. editor.

(1)

Leuthold, Jürg. author.

(1)

Li, Dongqing. editor.

(1)

Lindroos, Veikko.

(1)

Liu, Ai-Qun, author.

(1)

Liu, Ai-Qun. author.

(1)

Liu, Pengcheng. editor.

(1)

Liu, Qian. author.

(1)

Lovasz, Erwin-Christian. editor.

(1)

Lyshevski, Sergey Edward.

(1)

Machado, Marcio Bender. author.

(1)

Majumder, Manoj Kumar. author.

(1)

Malwal, Deepika. author.

(1)

Matai, Ishita. author.

(1)

Matsumoto, Kazuhiko. editor.

(1)

Misra, Durgamadhab. editor.

(1)

Mittal, K. L., 1945-

(1)

Miu, Lucica. editor.

(1)

Mohd. Isa, Wan Hasbullah. editor.

(1)

Mohd. Razman, Mohd. Azraai. editor.

(1)

Murday, James. editor.

(1)

Nagahanumaiah. editor.

(1)

Nazarov, Alexei. editor.

(1)

Neittaanmäki, Pekka. author.

(1)

Olofsson, Göran. editor.

(1)

Ono, Osamu. editor.

(1)

Osiander, Robert., author.

(1)

Otani, Yukitoshi.

(1)

Pal, Prem. editor.

(1)

Palumbo, Gaetano. author.

(1)

Pandey, Ashok Kumar. editor.

(1)

(1)

Pelesko, John A., author.

(1)

Peng, Changsi. author.

(1)

Petuya, Victor. editor.

(1)

Plamenevskii, Boris. author.

(1)

Poh Ai Ling, Amy. editor.

(1)

Potasz, Pawel. author.

(1)

Prorok, Barton C. editor.

(1)

Radin, Rafael Luciano. author.

(1)

Rasid, Mohd. Azri Hizami. editor.

(1)

Roukes, Michael Lee. author.

(1)

S. Dresselhaus, Mildred. editor.

(1)

Sachdev, Abhay. author.

(1)

(1)

Saile, Volker. author.

(1)

Salaheldeen Elnashaie, Said. author.

(1)

Santos, Hector J. de los.

(1)

Sarafanov, Oleg. author.

(1)

Sawan, Mohamad. author.

(1)

Schmid, Silvan. author.

(1)

Schneider, Marcio Cherem. author.

(1)

Schomburg, Werner Karl. author.

(1)

Sen, K.D. editor.

(1)

Shaw, III, Gordon. editor.

(1)

Silvi, Serena. editor.

(1)

Soueid, Ahmad. editor.

(1)

Srinivasa Rao, K. editor.

(1)

Starman, LaVern. editor.

(1)

Svendsen, Winnie E. editor.

(1)

Tagliaferro, Alberto. editor.

(1)

Tang, Francois. editor.

(1)

Teague, E. Clayton. editor.

(1)

Thomas, Jürgen. author.

(1)

Thompson, S. M. (Sarah M.)

(1)

Tjärnhage, Torbjörn. editor.

(1)

To, Suet. editor.

(1)

Torre, Vincent. editor.

(1)

(1)

Trommer, Rafael M. author.

(1)

Uday Kumar, S. author.

(1)

Venturi, Margherita. editor.

(1)

Villanueva, Luis Guillermo. author.

(1)

Wang, Sujuan. editor.

(1)

Webb, Jeffrey. editor.

(1)

Werner, Matthias, Dr.

(1)

Wu, Jiang. editor.

(1)

Xu, Y. B. (Yongbing)

(1)

Yahya, Mohamad Faizul. editor.

(1)

Zainal, Sheikh Muhammad Hafiz Fahami. editor.

(1)

Zentner, Lena. editor.

(1)

Zhang, Guigen. author.

(1)

Zhang, Tianhao, 1970- author.

(1)

Zhou, Ruhong. author.

(1)

Zhu, Weiming. author.

(1)

Zimmermann, Horst. author.

(1)

Language

(99)

(1)

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Publication Date

-

(28)

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(4)

(4)

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Subject

Microtechnology.

(63)

Microsystems and MEMS.

(61)

Nanotechnology.

(20)

(13)

(13)

Optical materials.

(13)

Electronic Circuits and Systems.

(12)

Electronic circuits.

(12)

Biomedical engineering.

(8)

Biomedical Engineering and Bioengineering.

(6)

Electronics and Microelectronics, Instrumentation.

(6)

(6)

(6)

Mechanics, Applied.

(5)

Surfaces (Technology).

(5)

Surfaces, Interfaces and Thin Film.

(5)

(5)

Characterization and Analytical Technique.

(4)

Machines, Tools, Processes.

(4)

(4)

Materials -- Analysis.

(4)

(4)

(4)

Renewable Energy.

(4)

Renewable energy sources.

(4)

Semiconductors.

(4)

Analytical chemistry.

(3)

Applied and Technical Physics.

(3)

(3)

Control engineering.

(3)

Control, Robotics, Automation.

(3)

Electronic books.

(3)

Microelectronics.

(3)

Mikroelektromekanik sistemler.

(3)

Nanostructured materials.

(3)

(3)

(3)

Solid Mechanics.

(3)

(3)

(3)

Spectrum analysis.

(3)

(2)

Aerospace engineering -- Equipment and supplies.

(2)

Biology -- Research.

(2)

(2)

Biomedical Research.

(2)

(2)

Computational intelligence.

(2)

Computer Communication Networks.

(2)

Computer networks .

(2)

(2)

Energy harvesting.

(2)

Engineering design.

(2)

Environmental monitoring.

(2)

Fluidic devices.

(2)

Industrial and Production Engineering.

(2)

Industrial engineering.

(2)

(2)

(2)

Machinery and Machine Elements.

(2)

(2)

(2)

Medicine -- Research.

(2)

Microelectronic packaging.

(2)

Microwaves, RF Engineering and Optical Communications.

(2)

Nanoelectromechanical systems.

(2)

Optoelectronic devices.

(2)

(2)

Physical chemistry.

(2)

Production engineering.

(2)

Separation (Technology)

(2)

Surface and Interface and Thin Film.

(2)

Surfaces (Physics).

(2)

Telecommunication.

(2)

Very high speed integrated circuits.

(2)

Accelerometers.

(1)

(1)

(1)

Aeronautical instruments.

(1)

Aeronautics -- Equipment and supplies.

(1)

Akselerometreler.

(1)

Artificial intelligence.

(1)

(1)

Ayırma (Teknoloji)

(1)

(1)

Bioinformatics.

(1)

Biomedical Devices and Instrumentation.

(1)

Biomedical materials.

(1)

Building Physics, HVAC.

(1)

Building materials.

(1)

Buildings -- Environmental engineering.

(1)

Capteurs (technologie)

(1)

Ceramic materials.

(1)

(1)

Chemistry, Physical and theoretical.

(1)

Chemistry, Technical.

(1)

Chip scale packaging.

(1)

Classical Electrodynamics.

(1)

Clinical biochemistry.

(1)

Computational Science and Engineering.

(1)

Computational and Systems Biology.

(1)

Computer architecture.

(1)

Condensed Matter Physics.

(1)

Condensed matter.

(1)

Continuum mechanics.

(1)

Crystallography and Scattering Methods.

(1)

Crystallography.

(1)

Dispositifs électromécaniques.

(1)

Dönüştürücüler.

(1)

Electric power production.

(1)

Electrical Power Engineering.

(1)

Electrochemistry.

(1)

Electrodynamics.

(1)

Electronic apparatus and appliances.

(1)

Electronic packaging.

(1)

Electrostatic atomization -- Methodology.

(1)

Energy Policy, Economics and Management.

(1)

Energy and state.

(1)

(1)

Engineering Fluid Dynamics.

(1)

Engineering Mechanics.

(1)

Fluid mechanics.

(1)

(1)

Health Sciences.

(1)

Industrial Chemistry.

(1)

Industrial Management.

(1)

Inertial navigation systems.

(1)

Innovation and Technology Management.

(1)

Integrated optics.

(1)

Internet of things.

(1)

Manipulators (Mechanism) -- Optical equipment.

(1)

Materials Engineering.

(1)

Materials science.

(1)

(1)

Mathematical physics.

(1)

Mathematics -- Data processing.

(1)

Measurement Science and Instrumentation.

(1)

(1)

Measuring instruments.

(1)

Mechanical Power Engineering.

(1)

Mechanical engineering.

(1)

Medical Biochemistry.

(1)

Medical instruments and apparatus.

(1)

Medical physics.

(1)

Medical sciences.

(1)

Metal oxide semiconductors, Complementary.

(1)

(1)

Microactuators.

(1)

Microchemistry -- methods.

(1)

Microelectromechanical systems -- Materials.

(1)

Microfabrication.

(1)

Microfluidics -- Equipment and supplies.

(1)

Microfluidics -- methods.

(1)

Micromécanique.

(1)

Microprocessors.

(1)

Microresonators (Optoelectronics).

(1)

Microresonators.

(1)

Microwave circuits.

(1)

Microwave devices.

(1)

Multibody Systems and Mechanical Vibrations.

(1)

Multibody systems.

(1)

MİKRODALGA DEVRE ELEMANI.

(1)

MİKROELEKTROMEKANİK SİSTEMLER

(1)

MİKROELEKTROMEKANİK SİSTEMLER.

(1)

Nanoengineering.

(1)

Nanoscale Devices.

(1)

Nuclear batteries -- Materials.

(1)

Nuclear physics.

(1)

(1)

Optical storage devices.

(1)

Optoelectronic devices -- Design and construction.

(1)

Passive components.

(1)

(1)

Polymerase chain reaction -- Automation.

(1)

Polymers -- Electric properties.

(1)

Processor Architectures.

(1)

Quantum optics.

(1)

Quantum physics.

(1)

Radio circuits -- Equipment and supplies.

(1)

Radioisotopes -- Industrial applications.

(1)

(1)

Self-assembly (Chemistry)

(1)

Silicon -- Electric properties.

(1)

Smart materials.

(1)

(1)

Spraying equipment.

(1)

Structural Materials.

(1)

Surfaces (Technology)

(1)

Technological innovations.

(1)

Telecommunication -- Equipment and supplies.

(1)

Theoretical Chemistry.

(1)

Theoretical, Mathematical and Computational Physics.

(1)

(1)

(1)

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1.

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Author

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Preferred Shelf Number

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Electronic Access

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Electronic Access

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Preferred Shelf Number

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Electronic Access

Taylor & Francis https://www.taylorfrancis.com/books/e/9781584886884
Taylor & Francis https://www.taylorfrancis.com/books/e/9780429143328
Taylor & Francis https://www.taylorfrancis.com/books/9780429143328
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf

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Electronic Access

https://doi.org/10.1007/978-3-319-15862-4

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