Limit Search Results
Author
SpringerLink (Online service)
(7)
Köhler, J. M. (J. Michael), 1956-
(2)
Wiley InterScience (Online service)
(2)
Arce, Gonzalo R.
(1)
Ashby, C.
(1)
Language
Publication Date
-
Subject
Plasma etching.
(9)
Electronic books.
(7)
Semiconductors.
(7)
Electronic Circuits and Systems.
(5)
Electronic circuits.
(5)
Material Type
Shelf Location
Switch to list view
Switch to thumbnail view
Select an Action
54 Results Found Subscribe to search results
000000000000DEFAULT
Print
1. 
Cover image for Complex and dusty plasmas : from laboratory to space
Complex and dusty plasmas : from laboratory to space
Author 
Fortov, V. E. Morfill, G. E.
Preferred Shelf Number 
QC718.5 .D84 C66 2010
Electronic Access 
Taylor & Francis http://www.taylorfrancis.com/books/9781420083125
Taylor & Francis https://www.taylorfrancis.com/books/9781420083125
Taylor & Francis https://www.taylorfrancis.com/books/9780367802882
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
Format: 
Availability 
Online Library~1
Available:
Copies:
2. 
Cover image for Microoptics and nanooptics fabrication
Microoptics and nanooptics fabrication
Author 
Kemme, Shanalyn A.
Preferred Shelf Number 
TA418.9 .N35 M533 2010
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
3. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
Format: 
Availability 
Online Library~1
Available:
Copies:
4. 
Cover image for Photonic MEMS devices : design, fabrication and control
Photonic MEMS devices : design, fabrication and control
Author 
Liu, Ai-Qun, author.
Preferred Shelf Number 
TK7875 .L58 2009
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
5. 
Cover image for Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Author 
Wüthrich, Rolf.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515876
Format: 
Availability 
Online Library~1
Available:
Copies:
6. 
Cover image for SiGe and Si strained-layer epitaxy for silicon heterostructure devices
SiGe and Si strained-layer epitaxy for silicon heterostructure devices
Author 
Cressler, John D.
Preferred Shelf Number 
TK7871.96 .B55 S53 2008
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
7. 
Cover image for Microlithography : science and technology
Microlithography : science and technology
Author 
Suzuki, Kazuaki. Smith, Bruce W., 1959-
Preferred Shelf Number 
TK7836 .M525 2007
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
8. 
Cover image for Handbook of semiconductor interconnection technology
Handbook of semiconductor interconnection technology
Author 
Schwartz, G. C. Srikrishnan, K. V., 1948-
Preferred Shelf Number 
TK7874.53 .H36 2006
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
9. 
Cover image for MEMS : design and fabrication
MEMS : design and fabrication
Author 
Gad-el-Hak, Mohamed, 1945-
Preferred Shelf Number 
TK7875 .M444 2006
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
10. 
Cover image for Landforms and geology of granite terrains
Landforms and geology of granite terrains
Author 
Twidale, C. R. Vidal Romaní, J. R. (Juan Ramón)
Preferred Shelf Number 
QE462 .G7 .T84 2005 EB
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9780367803407
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
Format: 
Availability 
Online Library~1
Available:
Copies:
11. 
Cover image for Microelectronic packaging
Microelectronic packaging
Author 
Datta, Madhav. Osaka, Tetsuya, 1945- Schultze, J. W. (Joachim Walter)
Preferred Shelf Number 
TK7870.15 .M53 2005
Electronic Access 
Click here to view.
Format: 
Availability 
Online Library~1
Available:
Copies:
12. 
Cover image for Principles of plasma discharges and materials processing
Principles of plasma discharges and materials processing
Author 
Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.
Preferred Shelf Number 
ONLINE
Electronic Access 
Full text available from Wiley InterScience
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
John Wiley http://dx.doi.org/10.1002/0471724254
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
Format: 
Availability 
Online Library~1
Available:
Copies:
Select an Action