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49. 
Cover image for Fundamentals of micromechanics of solids
Fundamentals of micromechanics of solids
Author 
Qu, Jianmin. Cherkaoui, Mohammed. Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9780470117835
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50. 
Cover image for Microfabrication and nanomanufacturing
Microfabrication and nanomanufacturing
Author 
Jackson, Mark J.
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51. 
Cover image for Smart material systems and MEMS design and development methodologies
Smart material systems and MEMS design and development methodologies
Author 
Varadan, V. K., 1943- Vinoy, K. J. (Kalarickaparambil Joseph), 1969- Gopalakrishnan, S. Wiley InterScience (Online service)
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http://www3.interscience.wiley.com/cgi-bin/bookhome/113378177/ProductInformation.html
John Wiley http://dx.doi.org/10.1002/0470093633
Volltext http://onlinelibrary.wiley.com/book/10.1002/0470093633
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52. 
Cover image for MEMS a practical guide to design, analysis, and applications
MEMS a practical guide to design, analysis, and applications
Author 
Korvink, J. G. (Jan G.) Paul, Oliver.
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ScienceDirect http://www.sciencedirect.com/science/book/9780815514978
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53. 
Cover image for CMOS-MEMS
CMOS-MEMS
Author 
Brand, Oliver, 1964- Fedder, G. K. (Gary K.) Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527616718
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54. 
Cover image for Micro electro mechanical system design
Micro electro mechanical system design
Author 
Allen, James J.
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55. 
Cover image for Micro-optomechatronics
Micro-optomechatronics
Author 
Hosaka, Hiroshi, 1956-
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56. 
Cover image for Analysis and design principles of MEMS devices
Analysis and design principles of MEMS devices
Author 
Bao, Min-Hang.
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ScienceDirect http://www.sciencedirect.com/science/book/9780444516169
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57. 
Cover image for Die Zukunft der Mikrosystemtechnik Chancen, Risiken, Wachstumsmärkte
Die Zukunft der Mikrosystemtechnik Chancen, Risiken, Wachstumsmärkte
Author 
Heimer, Thomas. Werner, Matthias, Dr.
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ONLINE
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Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=481865
John Wiley http://dx.doi.org/10.1002/3527603883
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58. 
Cover image for Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices
Author 
Baltes, H. (Henry) Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527616701
HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/55807757.html
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59. 
Cover image for RF MEMS and their applications
RF MEMS and their applications
Author 
Varadan, V. K., 1943- Vinoy, K. J. (Kalarickaparambil Joseph), 1969- Jose, K. A.
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John Wiley http://dx.doi.org/10.1002/0470856602
HathiTrust Digital Library Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/48466819.html
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60. 
Cover image for Modeling MEMS and NEMS
Modeling MEMS and NEMS
Author 
Pelesko, John A. Bernstein, David H.
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