Cover image for PVD for microelectronics sputter deposition applied to semiconductor manufacturing
Title:
PVD for microelectronics sputter deposition applied to semiconductor manufacturing
Author:
Powell, Ronald A.
ISBN:
9780125330268
Publication Information:
San Diego : Academic Press, c1999.
Physical Description:
1 online resource (xiii, 419 p.) : ill.
Series:
Thin films ; v. 26
Series Title:
Thin films ; v. 26
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