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1. 
Cover image for Principles of MEMS
Principles of MEMS
Author 
Lee, Ki Bang.
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ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438
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2. 
Cover image for Introduction to microfabrication
Introduction to microfabrication
Author 
Franssila, Sami.
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Electronic Access 
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Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=589187
John Wiley http://dx.doi.org/10.1002/9781119990413
Books24x7 http://www.books24x7.com/marc.asp?bookid=43226
http://site.ebrary.com/lib/alltitles/Doc?id=10419414
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3. 
Cover image for Advanced RF MEMS
Advanced RF MEMS
Author 
Lucyszyn, S. (Stepan)
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ONLINE
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EBSCOhost http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=337698
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4. 
Cover image for VLSI micro- and nanophotonics : science, technology, and applications
VLSI micro- and nanophotonics : science, technology, and applications
Author 
Lee, El-Hang.
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5. 
Cover image for Adhesion aspects in MEMS-NEMS
Adhesion aspects in MEMS-NEMS
Author 
Kim, Seong H. Dugger, Michael T. Mittal, K. L., 1945-
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6. 
Cover image for Handbook of silicon based MEMS materials & technologies
Handbook of silicon based MEMS materials & technologies
Author 
Lindroos, Veikko.
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ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515944
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