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1. 
Cover image for 3D and circuit integration of MEMS
3D and circuit integration of MEMS
Author 
Esashi, Masayoshi, 1949- author.
Preferred Shelf Number 
TK7875 .E73 2021 EB
Electronic Access 
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527823239
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2. 
Cover image for Whole-angle MEMs gyroscopes : challenges and opportunities
Whole-angle MEMs gyroscopes : challenges and opportunities
Author 
Senkal, Doruk, 1984- author. Shkel, Andrei, author.
Preferred Shelf Number 
TJ209 .S46 2020
Electronic Access 
https://onlinelibrary.wiley.com/doi/book/10.1002/9781119441908
Format: 
Availability 
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3. 
Cover image for Mechanics of microsystems
Mechanics of microsystems
Author 
Corigliano, Alberto, author.
Preferred Shelf Number 
TK7875
Electronic Access 
https://onlinelibrary.wiley.com/doi/book/10.1002/9781119053828
Format: 
Availability 
Online Library~1
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