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1. 
Cover image for Photomask fabrication technology
Photomask fabrication technology
Author 
Eynon, Benjamin G. Wu, Banqiu.
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ONLINE
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2. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527613786
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3. 
Cover image for Ätzverfahren für die Mikrotechnik
Ätzverfahren für die Mikrotechnik
Author 
Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.
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John Wiley http://dx.doi.org/10.1002/3527602917
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