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Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
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ONLINE
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John Wiley http://dx.doi.org/10.1002/9780470723876
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2. 
Cover image for Micro-manufacturing design and manufacturing of micro-products
Micro-manufacturing design and manufacturing of micro-products
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Koç, Muammer, 1968- Özel, Tuğrul, 1967- Wiley InterScience (Online service)
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ONLINE
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Wiley InterScience An electronic book accessible through the World Wide Web; click for information
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=675037
Wiley InterScience - Full Text Online http://onlinelibrary.wiley.com/book/10.1002/9781118010570
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3. 
Cover image for Microfabricated power generation devices design and technology
Microfabricated power generation devices design and technology
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Mitsos, Alexander. Barton, Paul I. Wiley InterScience (Online service)
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ONLINE
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Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=481559
John Wiley http://dx.doi.org/10.1002/9783527624065
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