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Cover image for Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan

Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan

Author

International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan) Hanaizumi, Osamu. Unno, Masafumi. Gunma Daigaku. International Education and Research Center for Silicon Science. Gunma Daigaku. Advanced Technology Research Center.

Preferred Shelf Number

ONLINE

Electronic Access

EBSCOhost http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=553111

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Online Library~1

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Polymers for microelectronics : resists and dielectrics

Author

Thompson, L. F., 1944- Willson, C. G. (C. Grant) 1939- Tagawa, Seiichi.

Preferred Shelf Number

TK7871.15.P6 P65 1994

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Beytepe Library~1

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Polymeric materials for microelectronic applications : science and technology

Author

Ito, Hiroshi, ed. Tagawa, Seichi, ed. Horie, Kazuyuki, 1941- Kåobunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group. American Chemical Society. Division of Polymeric Materials: Science and Engineering.

Preferred Shelf Number

TK 7871.15.P6 P59 1994

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Beytepe Library~2

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