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Library: Online Library

Author

SpringerLink (Online service)

(7)

Köhler, J. M. (J. Michael), 1956-

(2)

Wiley InterScience (Online service)

(2)

Arce, Gonzalo R.

(1)

(1)

(1)

Brunetti, Rossella. editor.

(1)

Chaffey, Nigel.

(1)

Chen, Kuan-Neng.

(1)

Cressler, John D.

(1)

Cui, Zheng. author.

(1)

D'Agostino, Riccardo.

(1)

Dakal, Tikam, editor.

(1)

(1)

Deshmukh, Kalim, editor

(1)

Elliott, Kim S., editor.

(1)

Fang, Xiaosheng.

(1)

Fink, Johannes Karl, author.

(1)

Flamm, Daniel L.

(1)

(1)

Gad-el-Hak, Mohamed, 1945-

(1)

Gatzen, Hans H. author.

(1)

Granitzer, Petra, editor.

(1)

Hamid, Zuhairi Abd, editor.

(1)

Hilleringmann, Ulrich. author.

(1)

Hussain, Chaudhery Mustansar, editor

(1)

Jiang, De-en, 1975- editor.

(1)

Jin, Rongchao, editor.

(1)

John Wiley & Sons.

(1)

Kan, Chi-wai, author.

(1)

Kasper, Erich, author.

(1)

Kaul, Anupama B.

(1)

Kemme, Shanalyn A.

(1)

Kissinger, Gudrun, editor.

(1)

Koester, Steven J.

(1)

Leuthold, Jürg. author.

(1)

Lian, Yaguang, author.

(1)

Lichtenberg, Allan J.

(1)

Lieberman, M. A. (Michael A.)

(1)

Lill, Thorsten, author.

(1)

Liu, Ai-Qun, author.

(1)

Lu, Daniel. editor.

(1)

(1)

(1)

Manos, Dennis M.

(1)

Meng, Hong, author.

(1)

Mittal, Kash L., 1945- editor.

(1)

(1)

Müller, Monika Freunek.

(1)

Nojiri, Kazuo. author.

(1)

Osaka, Tetsuya, 1945-

(1)

Pandey, Mayank, editor

(1)

Perdigão, Jorge. editor.

(1)

Pizzini, Sergio, editor.

(1)

Posseme, Nicolas, editor.

(1)

Powell, Ronald A.

(1)

(1)

Reggiani, Susanna. editor.

(1)

Roth, J. Reece., author.

(1)

Rudan, Massimo. editor.

(1)

Rumpf, Klemens Konrad Maria, editor.

(1)

Saile, Volker. author.

(1)

Sangwal, Keshra.

(1)

Sankaran, Mohan.

(1)

Schultze, J. W. (Joachim Walter)

(1)

Schwartz, G. C.

(1)

Sharma, Narendra, editor.

(1)

Sharma, Rekha, editor.

(1)

Shi, Yi (Electrical engineer), author.

(1)

Smith, Bruce W., 1959-

(1)

Srikrishnan, K. V., 1948-

(1)

Suzuki, Kazuaki.

(1)

Tan, Chuan Seng.

(1)

Tang, Z. (Zhiyong), editor.

(1)

Tarn, William H.

(1)

Taylor and Francis.

(1)

(1)

Vidal Romaní, J. R. (Juan Ramón)

(1)

Walker, Perrin.

(1)

Wang, Kaiying, author.

(1)

Wong, C.P. editor.

(1)

(1)

Wüthrich, Rolf.

(1)

Yan, Shancheng, author.

(1)

Yu, Jinzhong, 1943- author.

(1)

Zetterling, Carl-Mikael, ed.

(1)

Ōmi, Tadahiro, 1939-2016, editor.

(1)

Language

(53)

(1)

Publication Date

-

(5)

(4)

(4)

(3)

(3)

(3)

(3)

(3)

(3)

(2)

(2)

(2)

(2)

(2)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

Subject

Plasma etching.

(9)

Electronic books.

(7)

Semiconductors.

(7)

Electronic Circuits and Systems.

(5)

Electronic circuits.

(5)

(5)

Electronics and Microelectronics, Instrumentation.

(4)

Microelectromechanical systems.

(4)

Nanostructured materials.

(4)

Microsystems and MEMS.

(3)

Microtechnology.

(3)

Nanotechnology.

(3)

Plasma engineering.

(3)

Semiconductors -- Design and construction.

(3)

Semiconductors -- Etching.

(3)

TECHNOLOGY & ENGINEERING.

(3)

Diodes, Schottky-barrier.

(2)

Electronic apparatus and appliances.

(2)

(2)

(2)

Integrated circuits -- Design and construction.

(2)

Manufacturing processes.

(2)

Masks (Electronics)

(2)

Microelectromechanical systems -- Design and construction.

(2)

Microfabrication.

(2)

Microlithography.

(2)

Nanostructures.

(2)

Ohmic contacts.

(2)

(2)

Plasma chemistry -- Industrial applications.

(2)

(2)

(2)

Semiconductors--Junctions.

(2)

TECHNOLOGY / Material Science

(2)

(1)

BUSINESS & ECONOMICS -- Industries -- General.

(1)

Bioremediation -- Technological innovations.

(1)

Biorestauration -- Innovations.

(1)

Bipolar transistors -- Materials.

(1)

Bipolar transistors.

(1)

(1)

Botanical microscopy -- Technique.

(1)

Cellules photovoltaïques.

(1)

Chemical & Biochemical.

(1)

(1)

(1)

(1)

Circuits intégrés -- Conception et construction.

(1)

(1)

(1)

Composites polymères.

(1)

Concrete construction industry

(1)

Concrete construction industry.

(1)

Condensed Matter.

(1)

Construction en béton -- Industrie.

(1)

(1)

Contact lenses.

(1)

Crystal growth.

(1)

Crystals -- Etching.

(1)

(1)

(1)

Diodes électroluminescentes.

(1)

(1)

Dyes and dyeing.

(1)

Electric discharges -- Industrial applications.

(1)

Electrochemical cutting.

(1)

(1)

Etching reagents -- Handbooks, manuals, etc.

(1)

Gallium arsenide.

(1)

(1)

Germanium alloys.

(1)

Granite outcrops.

(1)

(1)

Green chemistry.

(1)

Heterojunctions.

(1)

Heterostructures.

(1)

Integrated circuits -- Design and construction

(1)

Integrated circuits -- Design and construction -- Mathematics.

(1)

Integrated circuits -- Masks.

(1)

Integrated circuits -- Very large scale integration -- Design and construction.

(1)

Integrated circuits -- Very large scale integration.

(1)

Interconnects (Integrated circuit technology)

(1)

Internet Resources.

(1)

Ion implantation.

(1)

(1)

(1)

Lentilles de contact.

(1)

Light emitting diodes.

(1)

(1)

(1)

Machines, Tools, Processes.

(1)

(1)

Materials Science.

(1)

Metal insulator semiconductors.

(1)

Metal oxide semiconductors, Complementary -- Design and construction.

(1)

Metal oxide semiconductors, Complementary.

(1)

Metals and Alloys.

(1)

(1)

Microelectronic packaging.

(1)

Microelectronics.

(1)

Microlithography -- Industrial applications.

(1)

Microlithography -- Mathematics.

(1)

Micromachining.

(1)

Micromechanics.

(1)

(1)

(1)

(1)

Nanoelectronics.

(1)

Nanomatériaux.

(1)

(1)

Nanostructured materials

(1)

Nanostructured materials -- Design and construction.

(1)

(1)

Nanostructures -- Optical properties.

(1)

Nanotechnology & MEMS.

(1)

Oberflächenbehandlung.

(1)

Optical materials.

(1)

Optoelectronic devices.

(1)

(1)

Perovskite materials.

(1)

Photolithography -- Mathematics.

(1)

Photovoltaic cells

(1)

Photovoltaic cells.

(1)

Physical Phenomena

(1)

(1)

Phénomènes physiques.

(1)

Plant molecular biology -- Technique.

(1)

Plasma chemistry.

(1)

Plasma dynamics.

(1)

Plasma polymerization.

(1)

(1)

(1)

(1)

Polymeric composites.

(1)

Polymers -- Surfaces.

(1)

(1)

Power semiconductors.

(1)

Resolution (Optics)

(1)

SCIENCE -- Energy.

(1)

SCIENCE -- Mechanics -- General.

(1)

SCIENCE -- Physics -- General.

(1)

SCIENCE / Astrophysics & Space Science

(1)

SCIENCE / Chemistry / Inorganic

(1)

SCIENCE / Life Sciences / General

(1)

Semi-conducteurs -- Attaque chimique.

(1)

Semi-conducteurs.

(1)

(1)

Semiconductors -- Cleaning.

(1)

Semiconductors -- Design and construction

(1)

Semiconductors -- Etching

(1)

Semiconductors -- Etching -- Mathematics.

(1)

Semiconductors -- Junctions.

(1)

Semiconductors -- Materials

(1)

Silicon -- Electric properties.

(1)

Silicon -- Optical properties.

(1)

Silicon alloys.

(1)

Silicon compounds.

(1)

Surface chemistry.

(1)

Surface preparation.

(1)

Surfaces (Technology) -- Analysis.

(1)

TECHNOLOGY & ENGINEERING -- Engineering (General)

(1)

TECHNOLOGY & ENGINEERING -- Reference.

(1)

TECHNOLOGY / General

(1)

TECHNOLOGY / Lasers

(1)

Textile chemistry.

(1)

Textile fibers -- Etching.

(1)

Thin films -- Surfaces.

(1)

Trees -- Cytochemistry -- Technique.

(1)

Wide gap semiconductors.

(1)

(1)

(1)

Material Type

Shelf Location

Electronic Library

Taylor Francis E-Book Collection

Wiley E-Book Collection

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1.

Cover image for Plasma etching an introduction

Plasma etching an introduction

Plasma etching an introduction

Author

Manos, Dennis M. Flamm, Daniel L.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780124693708

Format:

Availability

Online Library~1

Available:
Copies:

2.

Cover image for Dry etching for microelectronics

Dry etching for microelectronics

Dry etching for microelectronics

Author

Powell, Ronald A.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780444869050

Format:

Availability

Online Library~1

Available:
Copies:

3.

Cover image for Etching in microsystem technology

Etching in microsystem technology

Etching in microsystem technology

Author

Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/9783527613786

Format:

Availability

Online Library~1

Available:
Copies:

4.

Cover image for Photovoltaic manufacturing : etching, texturing, and cleaning

Photovoltaic manufacturing : etching, texturing, and cleaning

Photovoltaic manufacturing : etching, texturing, and cleaning

Author

Müller, Monika Freunek.

Preferred Shelf Number

TK8322

Electronic Access

https://onlinelibrary.wiley.com/doi/book/10.1002/9781119242024

Format:

Availability

Online Library~1

Available:
Copies:

5.

Cover image for Dry Etching Technology for Semiconductors

Dry Etching Technology for Semiconductors

Dry Etching Technology for Semiconductors

Author

Nojiri, Kazuo. author. SpringerLink (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

https://doi.org/10.1007/978-3-319-10295-5

Format:

Availability

Online Library~1

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6.

Cover image for Atomic layer processing : semiconductor dry etching technology

Atomic layer processing : semiconductor dry etching technology

Atomic layer processing : semiconductor dry etching technology

Author

Lill, Thorsten, author.

Preferred Shelf Number

TK7871.85

Electronic Access

https://onlinelibrary.wiley.com/doi/book/10.1002/9783527824199

Format:

Availability

Online Library~1

Available:
Copies:

7.

Cover image for Plasma etching processes for CMOS device realization

Plasma etching processes for CMOS device realization

Plasma etching processes for CMOS device realization

Author

Posseme, Nicolas, editor.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9781785480966

Format:

Availability

Online Library~1

Available:
Copies:

8.

Cover image for Plasma deposition, treatment, and etching of polymers

Plasma deposition, treatment, and etching of polymers

Plasma deposition, treatment, and etching of polymers

Author

D'Agostino, Riccardo.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780122004308

Format:

Availability

Online Library~1

Available:
Copies:

9.

Cover image for Etching of crystals theory, experiment, and application

Etching of crystals theory, experiment, and application

Etching of crystals theory, experiment, and application

Author

Sangwal, Keshra.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780444870186

Format:

Availability

Online Library~1

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Copies:

10.

Cover image for Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems

Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems

Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems

Author

Wang, Kaiying, author.

Preferred Shelf Number

TK7875

Electronic Access

Taylor & Francis https://www.taylorfrancis.com/books/9781003674795
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf

Format:

Availability

Online Library~1

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Copies:

11.

Cover image for Bio-nanomaterials in environmental remediation : industrial applications

Bio-nanomaterials in environmental remediation : industrial applications

Bio-nanomaterials in environmental remediation : industrial applications

Author

Sharma, Narendra, editor. Sharma, Rekha, editor. Dakal, Tikam, editor.

Preferred Shelf Number

TD192.5 .B56 2025

Electronic Access

https://onlinelibrary.wiley.com/doi/book/10.1002/9783527848546

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12.

Cover image for Single element semiconductors : properties and devices

Single element semiconductors : properties and devices

Single element semiconductors : properties and devices

Author

Shi, Yi (Electrical engineer), author. Yan, Shancheng, author.

Preferred Shelf Number

TK7871.85 .S55 2025

Electronic Access

https://onlinelibrary.wiley.com/doi/book/10.1002/9783527851782

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