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Plasma etching.
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1. 
Cover image for Plasma etching an introduction
Plasma etching an introduction
Author 
Manos, Dennis M. Flamm, Daniel L.
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ScienceDirect http://www.sciencedirect.com/science/book/9780124693708
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2. 
Cover image for Dry etching for microelectronics
Dry etching for microelectronics
Author 
Powell, Ronald A.
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ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
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3. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527613786
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4. 
Cover image for Dry Etching Technology for Semiconductors
Dry Etching Technology for Semiconductors
Author 
Nojiri, Kazuo. author. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-319-10295-5
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5. 
Cover image for Plasma etching processes for CMOS device realization
Plasma etching processes for CMOS device realization
Author 
Posseme, Nicolas, editor.
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ScienceDirect http://www.sciencedirect.com/science/book/9781785480966
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6. 
Cover image for Plasma deposition, treatment, and etching of polymers
Plasma deposition, treatment, and etching of polymers
Author 
D'Agostino, Riccardo.
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ScienceDirect http://www.sciencedirect.com/science/book/9780122004308
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7. 
Cover image for Etching of crystals theory, experiment, and application
Etching of crystals theory, experiment, and application
Author 
Sangwal, Keshra.
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ScienceDirect http://www.sciencedirect.com/science/book/9780444870186
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8. 
Cover image for Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
Author 
Hilleringmann, Ulrich. author. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-658-41041-4
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9. 
Cover image for Tooth Whitening An Evidence-Based Perspective
Tooth Whitening An Evidence-Based Perspective
Author 
Perdigão, Jorge. editor. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-031-38244-4
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10. 
Cover image for Springer Handbook of Semiconductor Devices
Springer Handbook of Semiconductor Devices
Author 
Rudan, Massimo. editor. Brunetti, Rossella. editor. Reggiani, Susanna. editor. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-030-79827-7
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11. 
Cover image for Micro and Nano Fabrication Tools and Processes
Micro and Nano Fabrication Tools and Processes
Author 
Gatzen, Hans H. author. Saile, Volker. author. Leuthold, Jürg. author. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-662-44395-8
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12. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
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Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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