Search Results for Microlithography.

Skip to:Search Results

|

|

|

|

|

|

|

Remember to clear the cache and close the browser window.

Search Limit

Rooms Restriction Values

13

Search Field

Target Value

Limit Value

Restriction Value

Search For:

Advanced Search

Limit Search Results

Narrowed by:

+

Subject: Microlithography.

Author

Helbert, John N.

(2)

Köhler, J. M. (J. Michael), 1956-

(2)

Ehrlich, Daniel J.

(1)

Eynon, Benjamin G.

(1)

Glendinning, William B.

(1)

John Wiley & Sons.

(1)

Lawson, Richard, editor.

(1)

Rai-Choudhury, P.

(1)

Robinson, Alex, editor.

(1)

Tsao, Jeffrey Y.

(1)

Wiley InterScience (Online service)

(1)

(1)

Language

(7)

(1)

Publication Date

-

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

Subject

Masks (Electronics)

(3)

Integrated circuits -- Very large scale integration.

(2)

Microfabrication.

(2)

Plasma etching.

(2)

Electronic books.

(1)

Integrated circuits -- Masks.

(1)

Lasers -- Industrial applications.

(1)

Lithographie (Halbleitertechnologie)

(1)

Micromachining.

(1)

Mikrofabrikasyon.

(1)

(1)

Mikrolitografi.

(1)

Photolithographie (Halbleitertechnologie)

(1)

(1)

Thin film devices -- Design and construction.

(1)

(1)

Material Type

Shelf Location

Beytepe General Collection

Electronic Library

Library

Beytepe Library

{sortLabel}

	{facetName}	{results}

	{displayName}	{count}
{error}

Switch to list view

Switch to thumbnail view

8 Results Found

Subscribe to search results

1

00000000DEFAULT

Print

Select a list

Make this your default list.

The following items were successfully added.

There was an error while adding the following items. Please try again.

One or more items could not be added because you are not logged in.

1.

Cover image for Handbook of microlithography, micromachining, and microfabrication

Handbook of microlithography, micromachining, and microfabrication

Handbook of microlithography, micromachining, and microfabrication

Author

Rai-Choudhury, P.

Preferred Shelf Number

TK7836 H3423 1997 V.1

Format:

Availability

Beytepe Library~2

Available:
Copies:

2.

Cover image for Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Author

Helbert, John N.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780815514442

Format:

Availability

Online Library~1

Available:
Copies:

3.

Cover image for Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Author

Glendinning, William B. Helbert, John N.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780815512813

Format:

Availability

Online Library~1

Available:
Copies:

4.

Cover image for Materials and Processes for Next Generation Lithography.

Materials and Processes for Next Generation Lithography.

Materials and Processes for Next Generation Lithography.

Author

Robinson, Alex, editor. Lawson, Richard, editor.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11

Format:

Availability

Online Library~1

Available:
Copies:

5.

Cover image for Photomask fabrication technology

Photomask fabrication technology

Photomask fabrication technology

Author

Eynon, Benjamin G. Wu, Banqiu.

Preferred Shelf Number

ONLINE

Electronic Access

Subscription required

Format:

Availability

Online Library~1

Available:
Copies:

6.

Cover image for Etching in microsystem technology

Etching in microsystem technology

Etching in microsystem technology

Author

Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/9783527613786

Format:

Availability

Online Library~1

Available:
Copies:

7.

Cover image for Ätzverfahren für die Mikrotechnik

Ätzverfahren für die Mikrotechnik

Ätzverfahren für die Mikrotechnik

Author

Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/3527602917

Format:

Availability

Online Library~1

Available:
Copies:

8.

Cover image for Laser microfabrication thin film processes and lithography

Laser microfabrication thin film processes and lithography

Laser microfabrication thin film processes and lithography

Author

Ehrlich, Daniel J. Tsao, Jeffrey Y.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780122334306

Format:

Availability

Online Library~1

Available:
Copies:

1

Go to:Search Results

|

|

Copyright 2018 Sirsi Corporation - Enterprise Version 5.0.0.11