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1. 
Cover image for Dynamics of Microelectromechanical Systems
Dynamics of Microelectromechanical Systems
Author 
Lobontiu, Nicolae. author. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
http://dx.doi.org/10.1007/978-0-387-68195-5
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2. 
Cover image for Mechanics of Microelectromechanical Systems
Mechanics of Microelectromechanical Systems
Author 
Lobontiu, Nicolae. author. Garcia, Ephrahim. author. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
http://dx.doi.org/10.1007/b100026
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3. 
Cover image for Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems
Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems
Author 
Wang, Kaiying, author.
Preferred Shelf Number 
TK7875
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9781003674795
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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4. 
Cover image for Slow Rarefied Flows Theory and Application to Micro-Electro-Mechanical Systems
Slow Rarefied Flows Theory and Application to Micro-Electro-Mechanical Systems
Author 
Cercignani, Carlo. author. SpringerLink (Online service)
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ONLINE
Electronic Access 
http://dx.doi.org/10.1007/3-7643-7537-X
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5. 
Cover image for Microscale Heat Transfer Fundamentals and Applications Proceedings of the NATO Advanced Study Institute on Microscale Heat Transfer — Fundamentals and Applications in Biological and Microelectromechanical Systems Cesme-Izmir, Turkey 18–30 July 2004
Microscale Heat Transfer Fundamentals and Applications Proceedings of the NATO Advanced Study Institute on Microscale Heat Transfer — Fundamentals and Applications in Biological and Microelectromechanical Systems Cesme-Izmir, Turkey 18–30 July 2004
Author 
Kakaç, S. editor. Vasiliev, L.L. editor. Bayazitoğlu, Y. editor. Yener, Y. editor. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
http://dx.doi.org/10.1007/1-4020-3361-3
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6. 
Cover image for RF MEMS theory, design, and technology
RF MEMS theory, design, and technology
Author 
Rebeiz, Gabriel M.
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/0471225282
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7. 
Cover image for Principles of MEMS
Principles of MEMS
Author 
Lee, Ki Bang.
Preferred Shelf Number 
ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438
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8. 
Cover image for Scaling issues and design of MEMS
Scaling issues and design of MEMS
Author 
Baglio, S. (Salvatore) Castorina, Salvatore. Savalli, Nicol.
Preferred Shelf Number 
ONLINE
Electronic Access 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0834/2007037324-b.html
John Wiley http://dx.doi.org/10.1002/9780470034071
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9. 
Cover image for Smart sensors and MEMS intelligent devices and microsystems for industrial applications
Smart sensors and MEMS intelligent devices and microsystems for industrial applications
Author 
Nihtianov, S., editor. Luque, A. (Antonio), editor.
Preferred Shelf Number 
ONLINE(355890.1)
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780857095022
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10. 
Cover image for Magnetic Nanostructures in Modern Technology Spintronics, Magnetic MEMS and Recording
Magnetic Nanostructures in Modern Technology Spintronics, Magnetic MEMS and Recording
Author 
Azzerboni, Bruno. editor. Asti, Giovanni. editor. Pareti, Luigi. editor. Ghidini, Massimo. editor. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
http://dx.doi.org/10.1007/978-1-4020-6338-1
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11. 
Cover image for Micro electromechanical systems (MEMS) : practical lab manual
Micro electromechanical systems (MEMS) : practical lab manual
Author 
Kumar, Sanjeet. Bhaiyya, Manish. Amreen, Khairunnisa. Kumar, Pavar Sai. Kumar, Abhishek.
Preferred Shelf Number 
TK7875 .K86 2025
Electronic Access 
https://onlinelibrary.wiley.com/doi/book/10.1002/9781394229864
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12. 
Cover image for Fundamentals of Nanomechanical Resonators
Fundamentals of Nanomechanical Resonators
Author 
Schmid, Silvan. author. Villanueva, Luis Guillermo. author. Roukes, Michael Lee. author. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
https://doi.org/10.1007/978-3-031-29628-4
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