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1. 
Cover image for Micro and Nano Fabrication Tools and Processes
Micro and Nano Fabrication Tools and Processes
Author 
Gatzen, Hans H. author. Saile, Volker. author. Leuthold, Jürg. author. SpringerLink (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
https://doi.org/10.1007/978-3-662-44395-8
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2. 
Cover image for Photonic MEMS devices : design, fabrication and control
Photonic MEMS devices : design, fabrication and control
Author 
Liu, Ai-Qun, author.
Preferred Shelf Number 
TK7875 .L58 2009
Electronic Access 
Click here to view.
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Online Library~1
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