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1. 
Cover image for Integrated microsystems electronics, photonics, and biotechnology
Integrated microsystems electronics, photonics, and biotechnology
Author 
Iniewski, Krzysztof.
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ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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2. 
Cover image for MEMS introduction and fundamentals
MEMS introduction and fundamentals
Author 
Gad-el-Hak, Mohamed, 1945-
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ONLINE
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3. 
Cover image for Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices
Author 
Baltes, H. (Henry) Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527616701
HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/55807757.html
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4. 
Cover image for Micromechanics and MEMS classic and seminal papers to 1990
Micromechanics and MEMS classic and seminal papers to 1990
Author 
Trimmer, W. Institute of Electrical and Electronics Engineers.
Preferred Shelf Number 
ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
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