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1. 
Cover image for Microoptics and nanooptics fabrication
Microoptics and nanooptics fabrication
Author 
Kemme, Shanalyn A.
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2. 
Cover image for Fabrication and design of resonant microdevices
Fabrication and design of resonant microdevices
Author 
Bahreyni, Behraad.
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ScienceDirect http://www.sciencedirect.com/science/book/9780815515777
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3. 
Cover image for MEMS design and fabrication
MEMS design and fabrication
Author 
Gad-el-Hak, Mohamed, 1945-
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4. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
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ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
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