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1. 
Cover image for LIGA and its applications
LIGA and its applications
Author 
Saile, Volker. Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527622573
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2. 
Cover image for Reliability of MEMS
Reliability of MEMS
Author 
Tsuchiya, Toshiyuki. Tabata, Osamu, 1956- Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527622139
MyiLibrary, Table of contents http://www.myilibrary.com?id=194693&ref=toc
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0838/2008459617-b.html
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3. 
Cover image for Smart material systems and MEMS design and development methodologies
Smart material systems and MEMS design and development methodologies
Author 
Varadan, V. K., 1943- Vinoy, K. J. (Kalarickaparambil Joseph), 1969- Gopalakrishnan, S. Wiley InterScience (Online service)
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http://www3.interscience.wiley.com/cgi-bin/bookhome/113378177/ProductInformation.html
John Wiley http://dx.doi.org/10.1002/0470093633
Volltext http://onlinelibrary.wiley.com/book/10.1002/0470093633
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4. 
Cover image for Fundamentals of micromechanics of solids
Fundamentals of micromechanics of solids
Author 
Qu, Jianmin. Cherkaoui, Mohammed. Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9780470117835
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5. 
Cover image for CMOS-MEMS
CMOS-MEMS
Author 
Brand, Oliver, 1964- Fedder, G. K. (Gary K.) Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527616718
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6. 
Cover image for Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices
Author 
Baltes, H. (Henry) Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527616701
HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/55807757.html
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